@article {33114,
	title = {Intrinsic stress in ZrN thin films: Evaluation of grain boundary contribution from in situ wafer curvature and ex situ x-ray diffraction techniques},
	journal = {Journal of Applied Physics},
	volume = {111},
	year = {2012},
	note = {Cited By :33Export Date: 27 April 2023},
	month = {2012},
	url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84864270322\&doi=10.1063\%2f1.4710530\&partnerID=40\&md5=852f1ba7e3a303e1e2bbade829804723},
	author = {Koutsokeras, L.E. and Abadias, G.}
}
