@article {33119,
	title = {Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti-Zr-N and Ti-Ta-N},
	journal = {Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films},
	volume = {28},
	year = {2010},
	note = {Cited By :77Export Date: 27 April 2023},
	month = {2010},
	pages = {541 - 551},
	url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-77954196319\&doi=10.1116\%2f1.3426296\&partnerID=40\&md5=9f82e5582d9a7e05f52c84c42955bc44},
	author = {Abadias, G. and Koutsokeras, L.E. and Dub, S.N. and Tolmachova, G.N. and Debelle, A. and Sauvage, T. and Villechaise, P.}
}
