@article {33120,
	title = {Stress evolution in magnetron sputtered Ti-Zr-N and Ti-Ta-N films studied by in situ wafer curvature: Role of energetic particles},
	journal = {Thin Solid Films},
	volume = {518},
	year = {2009},
	note = {Cited By :48Export Date: 27 April 2023},
	month = {2009},
	pages = {1532 - 1537},
	url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-70449495487\&doi=10.1016\%2fj.tsf.2009.07.183\&partnerID=40\&md5=72467798240627f20b4bd441d7c6d9b9},
	author = {Abadias, G. and Koutsokeras, L.E. and Guerin, Ph. and Patsalas, P.}
}
