@article {Abadias20091532,
	title = {Stress evolution in magnetron sputtered Ti-Zr-N and Ti-Ta-N films studied by in situ wafer curvature: Role of energetic particles},
	journal = {Thin Solid Films},
	volume = {518},
	number = {5},
	year = {2009},
	note = {cited By 48},
	pages = {1532-1537},
	doi = {10.1016/j.tsf.2009.07.183},
	url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-70449495487\&doi=10.1016\%2fj.tsf.2009.07.183\&partnerID=40\&md5=72467798240627f20b4bd441d7c6d9b9},
	author = {Abadias, G. and Koutsokeras, L.E. and Guerin, Ph. and Patsalas, P.}
}
