@article {34170,
	title = {Computational analysis of horizontal cold wall CVD reactors at low pressure: application to tungsten deposition from pyrolysis of W (CO) 6},
	journal = {Le Journal de Physique IV},
	volume = {11},
	year = {2001},
	pages = {Pr3-183-Pr3-188},
	publisher = {EDP sciences},
	isbn = {1155-4339},
	author = {Xenidou, TC and Koukou, MK and Boudouvis, AG and Markatos, NC}
}
