@conference {Chatzigiannakis:21,
	title = {Laser-structured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity},
	booktitle = {Conference on Lasers and Electro-Optics},
	year = {2021},
	pages = {SM3B.2},
	publisher = {Optical Society of America},
	organization = {Optical Society of America},
	abstract = {We develop ZnO/p-Si photodetectors by ALD deposition of ZnO thin films on laser- microstructured Si, which demonstrate high sensitivity and broadband operation (UV-Vis-NIR), due to increased specific surface area of the heterojunction and increased light absorption.},
	keywords = {Atomic layer deposition, Defect center materials, Laser materials processing, scanning electron microscopy, Thin films, Zinc oxide},
	doi = {10.1364/CLEO_SI.2021.SM3B.2},
	url = {http://www.osapublishing.org/abstract.cfm?URI=CLEO_SI-2021-SM3B.2},
	author = {Georgios Chatzigiannakis and Angelina Jaros and Renaud Leturcq and J{\"o}rgen Jungclaus and Tobias Voss and Spiros Gardelis and Maria Kandyla}
}
