@article {THEOCHARIS2023115192,
	title = {A study of field emission current in MEMS capacitors with bottom electrode covered by dielectric film},
	journal = {Microelectronics Reliability},
	year = {2023},
	pages = {115192},
	abstract = {The potential distribution in a MEMS capacitor with a thin dielectric film on the bottom electrode and under the presence of field emission leakage current is presented for the first time. The paper also demonstrated the build-up of dielectric charging during this process. The investigation is based on obtaining current-voltage characteristics in clockwise and counter clockwise loops and analyzing the transport mechanisms in MIM capacitors. Same procedure is applied to monitor the dielectric charging build-up during field emission in MEMS capacitors. The data of pristine current-voltage characteristics in both MIM and MEMS are used to determine the Voltage drops across the dielectric film and the gap as well as their dependence on the flowing current.},
	keywords = {Dielectric charging, Electrical characterization, Field emission, MEMS, MIM, Silicon nitride},
	issn = {0026-2714},
	doi = {https://doi.org/10.1016/j.microrel.2023.115192},
	url = {https://www.sciencedirect.com/science/article/pii/S0026271423002925},
	author = {Theocharis, J. and D. Birmpiliotis and Gardelis, S. and Papaioannou, G.}
}
