Computational analysis of horizontal cold wall CVD reactors at low pressure: application to tungsten deposition from pyrolysis of W (CO) 6

Citation:

Xenidou TC, Koukou MK, Boudouvis AG, Markatos NC. Computational analysis of horizontal cold wall CVD reactors at low pressure: application to tungsten deposition from pyrolysis of W (CO) 6. Le Journal de Physique IV. 2001;11(PR3):Pr3-183-Pr3-188.