Stress evolution in magnetron sputtered Ti-Zr-N and Ti-Ta-N films studied by in situ wafer curvature: Role of energetic particles
Citation:
Abadias G, Koutsokeras LE, Guerin P, Patsalas P. Stress evolution in magnetron sputtered Ti-Zr-N and Ti-Ta-N films studied by in situ wafer curvature: Role of energetic particles. Thin Solid Films [Internet]. 2009;518:1532-1537.
