Abstract:

The impact of ambient on the field emission and the resulting breakdown induced damage of rigid MEMS capacitive structure are investigated. The effect of asperities burning due to Joule heating and the resulting explosive breakdown are presented. The breakdown gives rise to almost mirror craters formation on the cathode and anode electrodes. A linear relation between crater diameter and the breakdown current is found when breakdown occurs in vacuum. In ambient atmosphere the breakdown leads to large amplitude current oscillations and the formation of extended damage on both electrodes.