HOME / PUBLICATIONS /

Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction

Citation:

Petrik P, Milita S, Pucker G, Nassiopoulou AG, Van Den Berg JA, Reading MA, Fried M, Lohner T, Theodoropoulou M, Gardelis S, et al. Preparation and characterization of nanocrystals using ellipsometry and X-ray diffraction. In: ECS Transactions. Vol. 25. ; 2009. pp. 373-378.

Abstract:

The aim of a joint research activity in the FP6-ANNA project (http://www.i3-anna.org) is to develop and improve metrologies for the measurement of nanocrystal properties. Within the framework of this cooperation we optimized the sample preparation techniques to obtain a range of structures containing nanocrystals. Based on these samples we have optimized our characterization methods. In this work we focus on ellipsometry and X-ray diffraction measurements for the characterization of nanocrystal sizes in silicon rich oxide and porous silicon. We demonstrate the capabilities of dielectric function parametrizations in the ellipsometric evaluations, revealing the correlation between the broadening parameters of the critical point features and the nanocrystal size. ©The Electrochemical Society.

Notes:

cited By 2

Website