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Laser-structured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity

Citation:

Chatzigiannakis G, Jaros A, Leturcq R, Jungclaus J, Voss T, Gardelis S, Kandyla M. Laser-structured ZnO/p-Si Photodetector with Enhanced and Broadband Responsivity. In: Conference on Lasers and Electro-Optics. Optical Society of America; 2021. pp. SM3B.2.

Abstract:

We develop ZnO/p-Si photodetectors by ALD deposition of ZnO thin films on laser- microstructured Si, which demonstrate high sensitivity and broadband operation (UV-Vis-NIR), due to increased specific surface area of the heterojunction and increased light absorption.

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