Abstract:

The potential distribution in a MEMS capacitor with a thin dielectric film on the bottom electrode and under the presence of field emission leakage current is presented for the first time. The paper also demonstrated the build-up of dielectric charging during this process. The investigation is based on obtaining current-voltage characteristics in clockwise and counter clockwise loops and analyzing the transport mechanisms in MIM capacitors. Same procedure is applied to monitor the dielectric charging build-up during field emission in MEMS capacitors. The data of pristine current-voltage characteristics in both MIM and MEMS are used to determine the Voltage drops across the dielectric film and the gap as well as their dependence on the flowing current.

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